| 摘要 |
<p>A gas generator system is provided wherein supply sources (1, 2) for halogenated gases, including pure molecular halogens, are connected into a gas reaction chamber (3), or chamber system, to enable generation of a predetermined gas for localised use in a subsequent process. The reaction chamber has a valved outlet (C) for direct supply of the generated gas to a single or multiple chamber processing tool or process chamber (4). Thus it is possible, for example, to provide for the localised generation of reactive process gases.</p> |
