| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method and an apparatus, for X-ray photoelectron spectroscopy, in which an effective XPS spectrum reducing an error based on an electrification phenomenon can be acquired by a method wherein an insulator sample whose analysis is hard due to the generation of the electrification phenomenon can be electrification-neutralized sufficiently. SOLUTION: This X-ray photoelectron spectroscopic apparatus 100 is provided with an X-ray generation part 10 which generates X-rays. In addition, the apparatus is provided with a detection part 20 which receives photoelectrons emitted from a sample 1 when the sample 1 is irradiated with the X-rays generated by the X-ray generation part 10. In addition, the apparatus is provided with an energy emission part 30 in which energy is emitted to at least a part of the sample 1 so that an electric charge generated on the surface of the sample 1 irradiated with the X-rays is neutralized. Then, in the X-ray generation part 10, a filament 12 which emits an electron beams for X-ray excitation is contained and a power supply 13 which is connected to the filament 12 is contained. The power supply 13 supplies electric power intermittently to the filament 12 so that the sample 1 is irradiated intermittently with the X-rays.
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