POSITIONING CONTROL METHOD

摘要

A positioning control method for suppressing vibration of a base by feeding back a compensation value of a pre-compensator having a motor transfer function (1) for causing a motor displacement (12) by the input of the sum of an input torque (13) and the product of a table propulsive power (10) multiplied by a reducing gear and orthogonal/polar coordinate transformation constant (14), a table transfer function (4) for causing the table propulsive power (10) by the product of the difference (11) between the output of the product of the motor displacement multiplied by a reducing gear and orthogonal/polar coordinate transformation constant (2) and a table displacement (8) multiplied by a table displacement/force transducing spring constant (3) and for outputting a table displacement (7) by the table propulsive power (10), and a base drive transfer function (5) for inputting the table propulsive power (10) and the power of the product of a base displacement (9) multiplied by a base displacement/power converting spring constant (6) so as to cause a base displacement (9), the pre-compensator being adapted to define a base vibration model for causing a table displacement (8) of the table on the base by the difference between the table displacement (7) and the base displacement (9).