摘要 |
PROBLEM TO BE SOLVED: To perform an exhaust process according to individual characteristics of a multi-electron source and to improve the processing efficiency of an exhaust process in a manufacturing process, in manufacturing an image display device having the multi-electron source with many cold-cathode elements arranged. SOLUTION: In this device for evacuating image display panels (1005-1007) including a multi-electron source composed of multiple cold-cathode elements, while a vacuum pump 2001 performs a evacuation of the image display panels, a measurement part 2002 measures a drive characteristic of a predetermined cold-cathode element within the image display panels. A control part 2003 determines whether or not prescribed drive characteristics are obtained based on the measurement result of the measurement part 2002, and when it is determined that prescribed drive characteristics are obtained, the evacuation by the vacuum pump 2001 is terminated.
|