发明名称 MANUFACTURE OF IMAGE DISPLAY PANEL, AND EVACUATION METHOD AND APPARATUS
摘要 PROBLEM TO BE SOLVED: To perform an exhaust process according to individual characteristics of a multi-electron source and to improve the processing efficiency of an exhaust process in a manufacturing process, in manufacturing an image display device having the multi-electron source with many cold-cathode elements arranged. SOLUTION: In this device for evacuating image display panels (1005-1007) including a multi-electron source composed of multiple cold-cathode elements, while a vacuum pump 2001 performs a evacuation of the image display panels, a measurement part 2002 measures a drive characteristic of a predetermined cold-cathode element within the image display panels. A control part 2003 determines whether or not prescribed drive characteristics are obtained based on the measurement result of the measurement part 2002, and when it is determined that prescribed drive characteristics are obtained, the evacuation by the vacuum pump 2001 is terminated.
申请公布号 JP2000243279(A) 申请公布日期 2000.09.08
申请号 JP19990039140 申请日期 1999.02.17
申请人 CANON INC 发明人 SAGANO OSAMU
分类号 H01J9/385;H01J9/42;(IPC1-7):H01J9/385 主分类号 H01J9/385
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