| 摘要 |
<p>An apparatus (l) for measuring displacement, adapted to measure displacement (recesses and projections) of a surface to be measured, with a high accuracy and at a high speed, wherein an object surface (30a) is scanned with the light applied thereto, whereby an amount of displacement of the object surface (30a) is measured in a non-contacting manner on the basis of a position of an imaging point (K) formed on a light receiving surface (9a) of a light receiving means (9), which comprises a lens array (7) which is provided with a plurality of condenser lenses (7a-7f) having uniform imaging properties around optical axes extending along the scanning direction of the light applied to the object surface, and which is adapted to converge the measuring light, and an imaging lens (8) having uniform imaging properties around optical axes and adapted to send the converged measuring light to the light receiving surface (9a) to form an imaging point (K) thereon, reflected light from a radiation point (P) being converged by the lens array (7), the converged reflected light being sent to the light receiving surface (9a) of the light receiving means (9) by the imaging lens (8) to form an image thereon, this enabling an image having a small aberration in the widthwise direction of the light receiving surface (9a) to be formed on the light receiving surface (9a), and displacement measurement with respect to the condition of the object surface (30a) to be conducted with a high accuracy.</p> |
