| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface resistance measuring device of a conductive film, capable of adjusting a part to be measured on the conductive film and suppressing a measurement error caused by pass line fluctuation without damaging the surface of the conductive film. SOLUTION: This surface resistance measuring device for measuring a surface resistance of a conductive film 2, is equipped with a first and a second electrodes 3a, 3b arranged separately from the conductive film 2, an alternating power source 6 for applying an alternating voltage between the first and the second electrodes 3a, 3b, and a calculation means 10 for calculating the surface resistance of the conductive film 2 based on a current flowing in the conductive film 2, and has such characteristics that the first and the second electrodes 3a, 3b are embedded in an insulating or dielectric substrate 5 and in an insulating or dielectric conveyance roller 4 for conveying the conductive film 2 in contact with the conductive film 2.
|
