| 摘要 |
A method and an apparatus for actively controlling the density of the species generated in a plasma reactor using time-modulation. The method of the present invention includes providing an inductively coupled plasma reactor, irradiating a process gas and time-modulating an energy emission from the RF applicator in order to achieve a desired density of species within a plasma. The time-modulation includes varying an on-time and an off-time of the modulating signal. Moreover, a short on-time and a longer off-time is preferred if the degree of dissociation is to be minimized. The apparatus of the present invention, in which the above method may be carried out, includes an all-semiconductor chamber having a signal modulator. Moreover, the apparatus includes a reactor having various embodiments of a solenoidal antenna and a signal modulator.
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