| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce an operator's load and a damage of an exposure mask by supporting a holder detachably mounted with the mask so as to reciprocatingly rotate around a horizontal shaft extended substantially perpendicularly to a vertical shaft provided at an end of a rotary base. SOLUTION: The exposure mask 1 with a pericle 3 is detachably mounted at a holder 15. The holder 15 is reciprocally rotated around a horizontal shaft 18 as indicated by an arrow A in a state such that one surface of the mask 1 is directed upward in a range of a suitable angle to alter an inclination of the mask 1. Further, a turntable 13 is rotated at a suitable angleθaround a vertical shaft 12 for supporting the turntable 13. The holder 15 is reciprocally rotated around the shaft 18 at its rotary position in a range of a suitable angle to alter the mask 1 to another inclination. Thus, since one surface of the mask 1 can be inclined in all directions, an operator's load is alleviated to improve a working efficiency.</p> |
