| 摘要 |
<p>PROBLEM TO BE SOLVED: To raise adhesiveness of a fluorocarbon resin coating to a substrate and improve reliability, by sequentially forming a coating of an organic zirconium compound, a coating of a resin containing no fluorine, and a coating of a polyimide-based resin containing fluorine on the substrate. SOLUTION: A coating of an organic zirconium compound, a coating of a resin containing no fluorine, and a coating of a polyimide-based resin containing fluorine are sequentially formed on a substrate. As the resin containing no fluorine, various resins such as a polyimide-based resin, silicone- based resin, acrylic resin, polycarbonate-based resin, epoxy-based resin, polyamide-based resin, polyester-based resin, or phenol-based resin can be used. In an application requiring heat resistance, a polyimide-based resin or a polyquinoline-based resin is preferable. Film thickness of the resin containing no fluorine is preferably at most 10μm, more preferably at most 1.0μm.</p> |
