MANUFACTURE OF TRANSPARENT CONDUCTIVE LAYERED BODY

摘要

PROBLEM TO BE SOLVED: To provide a low-resistivity transparent conductive film exhibiting reduced changes in a resistance value of the conductive film just after it is formed and in resistance during heat treatment within a range not exceeding the glass-transition temperature of a polymeric substrate, in order to enhance the productivity of the transparent conductive film. SOLUTION: In this manufacturing method of a transparent conductive layered body, a transparent conductive film mainly composed of indium oxide and including zinc oxide of 4 to 25 wt.% is formed on a polymeric substrate by using a target having In-Zn-O as main constituent by a sputtering method. The transparent conductive film is formed on the polymeric substrate in an atmosphere kept at a temperature below 80 deg.C in which the ratio of oxygen partial pressure to water partial pressure is within the range from 10 to 1000 while the ratio of the water partial pressure to that of inert gases is within the range from 1.3×10-5 to 2.5×10-4.