| 摘要 |
PROBLEM TO BE SOLVED: To perform positioning with increased having driving force and accuracy by specifying a rate of a number of stator electrodes to a number of rotor electrodes, and opposing at a point of stabilization the rotor electrodes to the adjacent stator electrodes on one side over the entire width of the stator electrodes and to a part of the width of the adjacent stator electrodes on the other side. SOLUTION: The ratio of the number of stator electrodes 11 to the number of rotor electrodes is constituted to 2:1 and the number of rotor electrodes 15b for driving is matched with the number of rotor electrodes 15a for direction restriction. At a point of stabilization, where the rotor 17 is brought to a rest by electrostatic attractive force exerted between the rotor electrodes 15a for direction restriction and the stator electrodes 11, and the rotor electrodes 15b for driving and the stator electrodes 11, the rotor electrodes 15a for direction restriction are positioned opposite to the two adjacent stator electrodes 11a and 11b, and further opposed to the stator electrode 11a on one side over the entire width of the stator electrode 11a and to a part of the width of the stator electrode 11b on the other side. Thus positioning can be performed with accuracy in a short time and an electrostatic motor with high driving torque is obtained.
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