| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable process by measuring the thickness direction and a warp of a substrate after a precedent process, and feeding forward the measurement results to the following process. SOLUTION: This three-dimensional measuring device has a gate-type structure, and is provided with a guide side strut 2 integral with a Y-axis carriage 10, and a support side strut 3 having an air pad 9. A measuring probe 7 is attached to the bottom end of a Z-axis spindle 4 guided to about the center part of an X-axis carriage 5. The device measures the upper face data of a surface plate 8 as many as a predetermined number of measuring points, and stores the data in memory beforehand. After a panel 11, an object to be measured, has been set, range measurement is carried out to the panel 11 at the same position as the upper face of the surface plate 8. And, the warp data of the panel 11 is calculated from an arithmetic operation of the measured data and the data of only the surface plate 8 stored in memory. These panel data are transferred to a following process.
|
