CHLOROTRIFLUORINE GAS GENERATOR SYSTEM

摘要

A C1F3 gas generation system is provided with supply sources of chlorine (3) (for example a cylinder of compressed chlorine) and fluorine (4) (for example a fluorine generator) connected into a gas reaction chamber (2) enabling generation of C1F3 gas. The reaction chamber has a valved outlet (C) for the supply of the C1F3 gas to a process chamber for immediate local use.