| 摘要 |
<p>A substrate handling system (40) with integrated door removal assembly (50) for an environmentally controlled substrate processing chamber is provided. The system includes a robot (32) positioned within the chamber. A drive mechanism (60) is connected to the robot (32). A door interface mechanism (62) is attached to the drive mechanism (60) and includes a door key (64) and a door key control assembly. The drive mechanism (60) provides mechanical control of the door key control assembly such that door key (64) is manipulated to couple a substrate carrier door (26) to a port door. The coupled doors are storable within the chamber or on the robot (32). The drive mechanism (60) may also include a substrate end effector (66), thereby allowing the robot (32) to transport substrates within the chamber. The robot (32) is movable within the chamber to multiple processing stations.</p> |
