| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an electrostatic chuck, where the electrostatic chuck can be made to have a uniform electrostatic attraction force preventing a substrate from being warped, and a dielectric layer formed as thick as required is obtained in a short time. SOLUTION: An electrode forming high-melting metal paste layer 6 is applied on the one surface of a board 1 formed of aluminum nitride sintered body made by liquid-phase sintering and dried out, a dielectric layer forming aluminum nitride paste layer 7 which is loaded with low-temperature sintering auxiliary and formed as thick as the layer 6 is applied onto the residual surface part of the board 1 and dried out. Thereafter, a paste layer 8 of the same kind with the aluminum nitride paste 7 is applied on them and then dried out, and the board 1 is burned at a temperature of 1500 to 1800 deg.C. |
