| 摘要 |
PROBLEM TO BE SOLVED: To correctly measure the emission current of an electron source required for performing performance evaluation, product quality determination and corrective drive of the electron source. SOLUTION: In measuring the emission current of elements of (m, n) of multiple electron sources composed of wiring multiple cold-cathode elements into a matrix form, respective wirings in each row direction and each column direction are set to the ground level while an acceleration voltage is applied to a high-voltage electrode, and a current Is flowing through the high-voltage electrode is measured with no electrons emitted from the multiple cold-cathode elements in S1, and a current Ie' flowing through the high-voltage electrode is measured by driving the elements of (m, n) in S2. Provided that a spacer is not connected to the wire in the row direction of the row (m), Ie'-Is in regarded as the emission current in S3, S4. Provided that the spacer is connected to the wiring in the row direction of the row (m), the high- voltage electrode is set to a ground level, a drive voltage is applied only to the wire in the row direction of the row (m), so that a current Isd flowing through the high- voltage electrode is measured, and Ie'-Is-Isd is regarded as the emission current in S3-S6.
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