发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF AND METHOD OF DESIGNING SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide an SOI-structure semiconductor device in which a substrate floating effect is reduced. SOLUTION: Each transistor forming region in an SOI layer 3 is isolated by a partial oxide film 31 having a lower layer part where a well region is formed. A p-type well region 11 is formed in the lower layer of the partial oxide film 31 for separating NMOS transistors. An n-type well region 12 is formed in the lower layer of the partial oxide film 31 for separating PMOS transistors. A p-type well region 11 and an n-type well region 12 are formed adjacent to each other in the lower layer of the partial oxide film 31 separating an NMOS transistor and a PMOS transistor. A body region is in contact with an adjacent well region 11. A wiring layer formed on an interlayer insulating film 4 is electrically connected to the body region via a body contact provided in the interlayer insulating film 4.
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申请公布号 |
JP2000243973(A) |
申请公布日期 |
2000.09.08 |
申请号 |
JP19990177091 |
申请日期 |
1999.06.23 |
申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
YAMAGUCHI YASUO;MAEKAWA SHIGETO;IPPOSHI TAKASHI;IWAMATSU TOSHIAKI;MAEDA SHIGENOBU;HIRANO YUICHI;MATSUMOTO TAKUJI;MIYAMOTO SHOICHI |
分类号 |
H01L21/762;H01L21/331;H01L21/8238;H01L21/84;H01L27/01;H01L27/08;H01L27/092;H01L27/12;H01L29/786;H01L31/00;(IPC1-7):H01L29/786 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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