发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF AND METHOD OF DESIGNING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an SOI-structure semiconductor device in which a substrate floating effect is reduced. SOLUTION: Each transistor forming region in an SOI layer 3 is isolated by a partial oxide film 31 having a lower layer part where a well region is formed. A p-type well region 11 is formed in the lower layer of the partial oxide film 31 for separating NMOS transistors. An n-type well region 12 is formed in the lower layer of the partial oxide film 31 for separating PMOS transistors. A p-type well region 11 and an n-type well region 12 are formed adjacent to each other in the lower layer of the partial oxide film 31 separating an NMOS transistor and a PMOS transistor. A body region is in contact with an adjacent well region 11. A wiring layer formed on an interlayer insulating film 4 is electrically connected to the body region via a body contact provided in the interlayer insulating film 4.
申请公布号 JP2000243973(A) 申请公布日期 2000.09.08
申请号 JP19990177091 申请日期 1999.06.23
申请人 MITSUBISHI ELECTRIC CORP 发明人 YAMAGUCHI YASUO;MAEKAWA SHIGETO;IPPOSHI TAKASHI;IWAMATSU TOSHIAKI;MAEDA SHIGENOBU;HIRANO YUICHI;MATSUMOTO TAKUJI;MIYAMOTO SHOICHI
分类号 H01L21/762;H01L21/331;H01L21/8238;H01L21/84;H01L27/01;H01L27/08;H01L27/092;H01L27/12;H01L29/786;H01L31/00;(IPC1-7):H01L29/786 主分类号 H01L21/762
代理机构 代理人
主权项
地址