| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a structure of an electron emission element that can be driven with a low voltage and has high efficiency and a long service life, to provide an electron source using it, to provide a uniform and high quality image forming device and to provide manufacturing methods for them. SOLUTION: This manufacturing method of an electron emission element comprises a process for forming a pair of element electrodes 2, 3 on a substrate 1, a process for forming a conductive film 4 straddling between the element electrodes 2, 3, a forming process for forming an electron emission part 5 on the conductive film 4 by carrying a current between the element electrodes 2, 3, a process for forming a polyimide film 6 containing polycyclic aromatic hydrocarbon by applying a liquid prepared by mixing the polycyclic aromatic hydrocarbon in a precursor solution of all aromatic polyimides to the conductive film 4 and by baking it, and a process for forming a carbonized part 7 in the polyimide film 6 containing the polycyclic aromatic hydrocarbon by carrying a current between the element electrodes 2, 3.</p> |
