摘要 |
<p>PROBLEM TO BE SOLVED: To improve the electrical characteristic of a conducive film by comprising a pair of elemental electrodes counterposed with one another on a base, the conductive film electrically connected to the element electrodes and an electron emissive portion formed on a part of the conductive film, and including nobel metal and metal oxide in the conductive film. SOLUTION: An electron emissive element is formed by a base 1, the element electrodes 2, 3, a conductive film 4 and an electron emissive portion 5. The noble metal as a main component of the conductive film 4, is an alloy or a mixture composed mainly of Pd, particularly Au, Pt, Ag which hardly oxidize in comparison with Pd, is preferably used. The metal oxide is not particularly specified but that it be capable of improving the adhesion property between an insulating bae and the conductive film 4 and be easily oxidizable, and is hardly reduced in comparison with Pd as the main component of the conductive film 4, such as a oxides of Bi, Cr, Zn, Fe, Co, Ni are preferably used. The conductive film 4 is manufactured under the condition that Pd:noble metal:metal oxide = (90:5:5) to (80:10:10) (mol%).</p> |