| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable a work piece or a substrate to be fixed in a processing chamber by a method, wherein a clamping ring is composed of an upper shielding part covered with a deposited material and a lower ring part protected by the upper shielding part. SOLUTION: A clamping ring 60 is composed of two pieces, an annular lower ring part 62 and an annular upper shielding part 64 covered with a deposited material. The annular upper shielding part 64 is arranged on a boundary surface 66, formed by the shoulder 67 of the annular upper shielding part 64, which serves to position the upper shielding part 64 to the lower ring part 62 in the radial direction of the lower ring part 62, protecting the annular lower ring part 62. By this setup, the lower ring part 62 can be set movable and fastened to the annular upper shielding part 64 in a detachable manner.</p> |
