| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the number of vacuum processes and to reduce a manufacturing period in a manufacturing method of an electron emission element. SOLUTION: Element electrodes 2, 3 and a conductive film 4 are formed on a substrate 1, an electron emission part 5 is formed by repeatedly applying a pulse voltage between the element electrodes 2, 3 in an atmosphere containing a reductive organic gas, while heating the substrate 1 to 50-150 deg.C, and a deposit comprising carbon and a carbon compound are deposited on the electron emission part 5 and its vicinity, by repeatedly applying a pulse voltage between the element electrodes 2, 3 in the same atmosphere.</p> |
