| 摘要 |
PROBLEM TO BE SOLVED: To ensure accurate pressure measurement by making a hollow hole substantially in the center of a pressure introduction pipe, bonding the opening part to the pressure downstream side, and providing a strain resistor element on the bottom part of a tubular bottomed cover provided with a protrusion being supported by a supporting plate on the outer side face. SOLUTION: A hollow hole 12 is made substantially in the center of a pressure introduction pipe 11 of SUS 630, or the like. A tubular bottomed cover 13 of SUS 631-CSPH, or the like, is bonded, on the opening side thereof, to the upper surface on the pressure downstream side of the pressure introduction pipe 11. A pair of inner strain resistor elements 14 and a pair of outer strain resistor elements 15 comprising a thin film metal resistor are provided on the outside of the bottomed part. An alumina protective layer 13a is provided on the upper surface of the cover 13, and an outward protrusion 22 is provided on the outer side face of the cover 13. A metal supporting plate 23 has one end supporting the upper surface of the protrusion 22 and the other end bonded to the upper surface of the pressure introduction pipe 11. Even if a strong pressure is loaded to the pressure sensor, the protrusion 22 abuts against the supporting plate 23 to keep airtightness at the bonding face between the pressure introduction pipe 11 and the cover 13.
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