CLOGGED NOZZLE DETECTION APPARATUS AND METHOD

摘要

PROBLEM TO BE SOLVED: To attain a clogged nozzle detection apparatus with simplified structure and method that can accurately detect clogging of chucking nozzle and erroneous loading of chucking nozzles in different diameters. SOLUTION: This clogged nozzle detection apparatus detects clogging of a nozzle hole (14a) of a chucking nozzle to chuck electronic component A and detects errors in the loading of the chucking nozzle 14. In this case, A vacuum chucking means 52 is provided for sucking air via the nozzle hole (14a), a flow- rate measuring means 54 provided via a vacuum path 44 which communicates with the nozzle hole (14a) for measuring flow rate of sucking air passing the nozzle hole 14a and a nozzle clogging detecting means 57 for detecting the clogging of the nozzle hole (14a) and errors in loading of the suction nozzle 14 by comparing the actual flow rate measured with the flow rate measuring means 54 with the designed flow rate of the nozzle hole (14a) stored in advance.