发明名称 CAPACITIVE MICROFLOW SENSOR
摘要 PROBLEM TO BE SOLVED: To avoid standing of bubbles in a fluid within a sensor. SOLUTION: A first substrate 1 is provided with a detection electrode 16 while a second substrate 2 is provided with a boss part 4 oppositely to the detection electrode 16 and a measuring recess 3 is made around the boss part 4. The second substrate 2 is further provided with passages 6a, 6b interconnecting the measuring recess 3 and the outside so that a fluid can flow into the measuring recess 3 through the interconnecting passages 6a, 6b. Furthermore, bubble discharging passages 10a, 10b communicating the measuring recess 3 are provided substantially oppositely to the interconnecting passages 6a, 6b so that bubbles generated in the measuring recess 3 can be discharged to the outside through the bubble discharging passages 10a, 10b.
申请公布号 JP2000241277(A) 申请公布日期 2000.09.08
申请号 JP19990046082 申请日期 1999.02.24
申请人 ZEXEL CORP 发明人 KANAI YOSHITAKA;MIZUNO JUN;OLIVER BERBERICH;KAI NOTTMAYER
分类号 G01L9/12;G01L13/06;(IPC1-7):G01L13/06 主分类号 G01L9/12
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