| 摘要 |
PROBLEM TO BE SOLVED: To provide a quartz glass waveguide having very little polarization dependence or polarization dependence loss. SOLUTION: This manufacturing method comprises the steps of: forming a core glass film formed of SiO2, with a higher index of refraction than that of quartz glass on a quartz glass substrate 1; forming plural core waveguides 2 having a height h1 in the core glass film by photolithography and reactive ion etching; forming SiO2, glass to which P and F are added on the core waveguide 2 and on the quarts glass substrate 1; flattening the same to have a height h1 to form a first clad layer 3 surrounding the core waveguide 2; and further forming a second clad layer 4 formed of pure SiO2, glass and substantially not containing dopant on the core waveguide 2 and on the first clad layer 3. |
