发明名称 CONTINUOUSLY PROCESSING METHOD AND DEVICE OF OBJECT
摘要 PROBLEM TO BE SOLVED: To provide a processing method and a device, where objects can be continuously processed restraining parasitic attachment and high temperatures from adversely affecting a series of processing. SOLUTION: Processing object are transferred to a processing device 10 along a transfer path 16 by transfer devices 36, 38, 40, and 42 which make a rectilinear reciprocating motion. The objects are sent on the transfer path 16 by delivery devices 22, 24 and 60, 62 and taken out of the transfer path 16. The objects are placed on work piece supports 18, 20, 26, and 52, and the work piece supports are arranged in lines on the transfer path by at least two out of the first transfer devices and then continuously transferred to a processing device. The supports are arranged in lines and continuously transferred through a manner where one of the first transfer devices transfers the support so as to arrange it in line with the other support arranged on the transfer path, and the other of the first transfer devices continuously transfers the supports arranged in lines.
申请公布号 JP2000243810(A) 申请公布日期 2000.09.08
申请号 JP20000044811 申请日期 2000.02.22
申请人 ANGEWANDTE SOLARENERGIE ASE GMBH 发明人 LAUINGER THOMAS;ABERLE ARMIN;AUER RICHARD;HALBACH GUIDO;KANNE MANUEL;PASCHKE HANNO;MOSCHNER JENS
分类号 B65G49/07;C23C16/44;H01L21/205;H01L21/677;(IPC1-7):H01L21/68 主分类号 B65G49/07
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