BESCHLEUNIGUNGSSENSOR UND VERFAHREN ZU SEINER HERSTELLUNG

摘要

PCT No. PCT/FR96/01968 Sec. 371 Date Jul. 30, 1998 Sec. 102(e) Date Jul. 30, 1998 PCT Filed Dec. 10, 1996 PCT Pub. No. WO97/22010 PCT Pub. Date Jun. 19, 1997An accelerometer based on monocrystalline silicon. A moving mass is connected to a fixed frame by suspension arms. The sensor is produced in the stack of two silicon wafers in which stop and counter-stop functions are produced so as to limit the amplitude of the movements of the moving mass.