| 摘要 |
<p>A lot-base management host computer 11 performs management of wafers with a lot as a unit by managing a process condition for each lot, a correspondence between a carrier ID and a slot ID, and a correspondence between a slot ID and a wafer ID in each lot. A wafer-base management host computer 12 performs management for each wafer in a lot by managing a process condition corresponding to a wafer number in a lot. A converted-condition instructing section 13 transmits data acquired from computers 11, 12 to a semiconductor fabrication apparatus 14. The wafer-base management host computer stores a process condition for each level and a machine number of a semiconductor fabrication apparatus in the form of a matrix as an experimental level master, and issues a process condition to the semiconductor fabrication apparatus through the converted-condition instructing section according to the master for experimental levels.</p> |
