发明名称 Semiconductor device and manufacturing method thereof
摘要 In a manufacturing method of an active matrix type liquid crystal display device, a semiconductor device having good TFT characteristics is realized. LDD regions of a driver circuit NTFT and LDD regions of a pixel section NTFT are given different impurity concentration. An impurity is doped at differing concentrations using a mask. Thus a liquid crystal display device provided with a driver circuit having high speed operation and a pixel section with high reliability can be obtained.
申请公布号 EP1033755(A2) 申请公布日期 2000.09.06
申请号 EP20000104686 申请日期 2000.03.03
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 OHTANI, HISASHI
分类号 H01L27/12;G02F1/1362;H01L21/336;H01L21/77;H01L21/84;H01L27/32;H01L29/786 主分类号 H01L27/12
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