| 摘要 |
PROBLEM TO BE SOLVED: To effectively prevent the corrision of a magnetic bearing and a driving motor and to prevent the intrusion of impurity into the working fluid in a sealed chamber from the magnetic bearing and the driving motor, by preventing the leakage of the working fluid to the outside of the closed chamber even when the working fluid is a corrosive gas. SOLUTION: An impeller 11 for introducing and sending a working gas is rotatably mounted in a closed chamber 10, and a rotary shaft 12 projecting from this closed chamber 10 is rotatably supported by the magnetic bearings 14, 17 in a non-contact state. This rotary shaft 12 is rotated and driven by a driving motor 16 in a non-contact state, and the rotary shaft 12 projecting from the closed chamber 10 is surrounded by a closed shield thin wall 20 made of a non-magnetic body.
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