DOUBLE-SURFACE POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce a production cost by miniaturizing a double-surface polishing device and to prevent a reduction of a polishing accuracy. SOLUTION: A plurality of carriers 70, 70... are arranged around a rotation center between an upper and lower rotation surface plates. The respective carriers 70 are external gears and eccentrically retain a work 90 at an inner side. A center gear 50 is provided on the rotation center portion between the rotation surface plates and rotating means 60 are arranged around the rotation center corresponding to the respective carriers 70. The respective rotation means 60 are constituted of worm gears 64 and rotates the corresponding carriers 70 at a constant position in cooperation with the center gear 50. The worm gear 64 is made of a resin so as to prevent a generation of a metal powder due to an engagement with the carrier 70. Since a contact length with the carrier 70 is long, a local abrasion due to an engagement with the carrier 70 can be inhibited in spite of made of a resin.