发明名称 |
System for correcting eccentricity and rotational error of a workpiece |
摘要 |
A system for correcting eccentricity and rotational error of a substantially circular workpiece, in which the workpiece is moved to a workstation, using a translating device. The rotational position and position of the workpiece center is determined. There is a rotatable member at the workstation, having a home position and a center. The rotatable member is pre-rotated from its home position an amount sufficient to correct workpiece rotational error. The translating device is caused to place the workpiece on the rotatable member such that the workpiece center is at a known position relative to the center of the rotatable member, to correct eccentricity. The rotatable member is then rotated back to its home position, to correct rotational error.
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申请公布号 |
US6114705(A) |
申请公布日期 |
2000.09.05 |
申请号 |
US19970927503 |
申请日期 |
1997.09.10 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
LEAVITT, WILLIAM;HOLBROOK, DAVID |
分类号 |
H01L21/68;(IPC1-7):G21K5/10;H01J39/30 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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地址 |
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