CHEMICAL SUPPLYING APPARATUS USED IN SEMICONDUCTOR DEVICE MANUFACTURING

摘要

PURPOSE: A chemical supplying apparatus is to continuously supply chemical through other filter when a filter provided in a chemical supplying line is out of order. CONSTITUTION: A chemical supplying apparatus comprises a chemical supplying source, a chemical supplying section, and a single supplying line from the chemical supplying source to the chemical supplying section. A first chemical supplying line(70) and a second chemical supplying line(80) are branched from the single line. Two parallel filters for filtering impurities contained in chemical are positioned in the first and second chemical supplying lines. The single chemical supplying line is provided on its ends with a first pressure transformer(20) and a second pressure transformer(21), respectively. The first and second chemical supplying lines are provided on ends thereof with an automatic valve(50) for chemical.