THERMAL COMPRESSION TYPE LIQUID INJECTION APPARATUS

摘要

PURPOSE: A thermal compression type liquid injection apparatus is provided to accomplish an improved quality and reliability of the apparatus while preventing deterioration of performance of membrane caused by an air bubble. CONSTITUTION: An apparatus comprises a driving unit having an operating liquid chamber(111) containing operating liquid and electrodes(112a,112b,112c) and heating element(113) for thermally expanding the operating liquid so as to generate a driving force, a membrane driven by the driving force from the driving unit, a nozzle unit for injecting liquid through a nozzle being driven by the membrane, an operating liquid injection path(117) for injecting operating liquid into the operating liquid chamber(111), an operating liquid injection port connected to a plurality of operating liquid injection path(117), and a member(140) for removing air bubble generated from the plurality of operating liquid chambers(111) and operating liquid injection path.