发明名称 |
Photopolymerizable composition containing an N-heterocyclic photoinitiator |
摘要 |
A photopolymerizable composition, which contains a polymeric binder, a compound which can be polymerized by free radicals and has at least one terminal ethylenic double bond and a photoinitiator combination comprising an N-heterocyclic compound, a thioxanthone derivative and a dialkylamino compound, is highly photosensitive and produces photoresist stencils with vertical side walls.
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申请公布号 |
US6114091(A) |
申请公布日期 |
2000.09.05 |
申请号 |
US19970962781 |
申请日期 |
1997.11.03 |
申请人 |
MORTON INTERNATIONAL, INC. |
发明人 |
GEISSLER, ULRICH;FROMMELD, HANS-DIETER;RUCKERT, HANS |
分类号 |
G03F7/004;C08F2/50;G03F7/027;G03F7/028;G03F7/031;G03F7/032;G03F7/038;H01L21/027;H05K3/06;(IPC1-7):G03C1/73 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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