发明名称 Photopolymerizable composition containing an N-heterocyclic photoinitiator
摘要 A photopolymerizable composition, which contains a polymeric binder, a compound which can be polymerized by free radicals and has at least one terminal ethylenic double bond and a photoinitiator combination comprising an N-heterocyclic compound, a thioxanthone derivative and a dialkylamino compound, is highly photosensitive and produces photoresist stencils with vertical side walls.
申请公布号 US6114091(A) 申请公布日期 2000.09.05
申请号 US19970962781 申请日期 1997.11.03
申请人 MORTON INTERNATIONAL, INC. 发明人 GEISSLER, ULRICH;FROMMELD, HANS-DIETER;RUCKERT, HANS
分类号 G03F7/004;C08F2/50;G03F7/027;G03F7/028;G03F7/031;G03F7/032;G03F7/038;H01L21/027;H05K3/06;(IPC1-7):G03C1/73 主分类号 G03F7/004
代理机构 代理人
主权项
地址
您可能感兴趣的专利