| 摘要 |
PROBLEM TO BE SOLVED: To efficiently recover the abrasive grains and the water soluble solvent by setting a weight ratio of the abrasive grains and the water soluble solvent of the slurry before use at a specified value, and working the centrifugal force to the used slurry so as to separate the used slurry into the abrasive grain component to be recycled, air to be discharged, and the grain component. SOLUTION: Slurry to be supplied to a centrifugal separating device 5 is introduced into the centrifugal separating device 5 through a slurry introducing port 17a, and separated into the slurry to be recovered as the abrasive grains to be recycled and the waste liquid as the waste abrasive grain component. Centrifugal force at 100 G-1000 G is desirably applied to the used slurry. When the centrifugal force exceeds 1000 G, recovery factor of the abrasive grains and the solvent is improved, but a lot of Si chips is undesirably recovered together at the same time. Weight ratio of the abrasive grains and the water soluble solvent in the slurry before use is desirably set at 1:1.2-0.8, considering cutting efficiency of a wire saw 2, circulating efficiency of the wire saw abrasive grains flowing inside of a recycle device and separating efficiency by the centrifugal separating device 5.
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