发明名称 |
Integrated circuit spiral inductor |
摘要 |
High quality factor (Q) spiral and toroidal inductor and transformer are disclosed that are compatible with silicon very large scale integration (VLSI) processing, consume a small IC area, and operate at high frequencies. The spiral inductor has a spiral metal coil deposited in a trench formed in a dielectric layer over a substrate. The metal coil is enclosed in ferromagnetic liner and cap layers, and is connected to an underpass contact through a metal filled via in the dielectric layer. The spiral inductor also includes ferromagnetic cores lines surrounded by the metal spiral coil. A spiral transformer is formed by vertically stacking two spiral inductors, or placing them side-by-side over a ferromagnetic bridge formed below the metal coils and cores lines. The toroidal inductor includes a toroidal metal coil with a core having ferromagnetic strips. The toroidal metal coil is segmented into two coils each having a pair of ports to form a toroidal transformer.
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申请公布号 |
US6114937(A) |
申请公布日期 |
2000.09.05 |
申请号 |
US19970949316 |
申请日期 |
1997.10.14 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BURGHARTZ, JOACHIM NORBERT;EDELSTEIN, DANIEL CHARLES;JAHNES, CHRISTOPHER VINCENT;UZOH, CYPRIAN EMEKA |
分类号 |
H01F17/00;H01F17/06;H01F27/28;H01F30/16;H01F41/04;H01L23/522;(IPC1-7):H01F5/00 |
主分类号 |
H01F17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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