HEATING DEVICE FOR VACUUM COATING EQUIPMENT

摘要

PURPOSE: A heating device for a vacuum coating equipment is provided to raise the uniformity of the film coated on a base plate, form high quality coating film without impurities, and reduce the production cost by simplifying the coating equipment. CONSTITUTION: A heating device for a vacuum coating equipment includes followings. A heating device(20) is made for containing specific amount of organism(22) with an open mouth at the top. A gauze curtain(24) with upward convexity and multiple tiny holes is installed on the open mouth. The gauze curtain(24) is made of stainless steel or glass. A heater that can heat and sublime the organism(22) at the temperature of less than 100°C is installed in the heating device(20). The organism(22) sublimed at the bottom of the heating device(20) is coated on the upwardly convex gauze curtain(24), is sublimed again and passes through the open mouth of the heating device(20). The organism(22) is coated uniformly on the base plate.