| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method and an apparatus for a micro- structure having high resolution in the laminating direction and high sectional form accuracy. SOLUTION: Plural cells are set on a pattern base plate, and a thin film bearing member 3 where plural pattern thin films and alignment marks are formed is set on a x-y-0 stage 4 in each cell. The positions of the alignment marks are detected by alignment detecting parts 5A, 5B, and according to the detection results, the object cell on the pattern base plate and an opposite base plate 6 are positioned, and when the pattern base plate and the opposite base plate 5 are pressed, plural thin films in the object cell are joined to the opposite base plate 6, and when the pattern base plate and the opposite base plate 6 are separated, the thin films are transferred to the opposite base plate 6. By repeating positioning and transfer, plural thin films are stacked and joined on the opposite base plate 6 to form a micro-structure.
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