| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum washing/drying method and device in which oil or dirt can be surely removed from work in a short time and also the work can be dried and safety can be secured. SOLUTION: After work 11 is immersed in a hydrocarbon solvent 12 stored in a washing tank 13 and the washing tank 13 is evacuated, impure oil stuck on the work 11 is eluted into the hydrocarbon solvent 12 while ultrasonic vibration and oscillation are given and also solid dirt is removed by a filter to wash the work 11. After the work 11 after washing is put in a finish washing/drying tank 16 and hydrocarbon vapor obtained by heating and vaporizing the hydrocarbon solvent 12 is introduced into the finish washing/drying tank 16 and the inner space of the finish washing/drying tank 16 is evacuated, it is opened to the air, and if necessary, this action is repeated plural times, thereby performing vapor washing and vacuum drying. After the impure oil stuck on the work 11 is removed, the work 11 is dried.
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