发明名称 |
Apparatus and method for estimating background tilt and offset |
摘要 |
A computer implemented software device for estimating background tilt and offset is disclosed to preferably be adaptable to an optical measurement instrument wherein the estimated parameters are resolved to generate a reference plane to be subtracted from a height map of a phase profile. A set of histograms of heights is used to develop a merit function. A two-dimensional high speed iterative search is used to optimize the merit function to generate a reference plane coincident with the spatial tilt of the phase profile. The invention enables real-time measurement of substrate height for preferred use in high-speed image processing operations relating to circuit-board production lines.
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申请公布号 |
US6115491(A) |
申请公布日期 |
2000.09.05 |
申请号 |
US19980159857 |
申请日期 |
1998.09.24 |
申请人 |
CYBEROPTICS CORPORATION |
发明人 |
RUDD, ERIC P.;FISHBAINE, DAVID |
分类号 |
G06T7/00;(IPC1-7):G06K9/52;G06T1/20;G06T3/00;G06T5/40 |
主分类号 |
G06T7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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