| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a workpiece retaining device and a method for activating the workpiece retaining device in which a locking/releasing of a holder is certainly carried out and which does not form a particle. SOLUTION: The workpiece retaining device for a vacuum unit ha independently displaceable coolable/heatable transmission plate 2 in a base plate 1 including a heat transmission surface 3. The heat transmission surface 3 is surrounded by an O ring 4 and is connected to a pipe 5. The heat transmission surface 3 is urged to the O ring 4 with a workpiece 15 by a holder 16 to close a gap 20. After the holder 16 and the base plate 1 are locked with no load, stop portions 23, 22 act between the heat transmission plate 2 and the holder 16 and the heat transmission plate 2 is lifted by an atmospheric pressure until a gap width is determined. The gap is filled with a heat transmission medium from the pipe 5. After the processing of the workpiece, the heat transmission plate 2 is descended and the holder is again released to the state of no load.</p> |
