发明名称 IRON-NICKEL BASED ALLOY MEMBER AND GLASS SEALING PARTS
摘要 PROBLEM TO BE SOLVED: To eliminate the generation of cracks caused by a heat cycle and to increase the reliability in sealing by respectively controlling the thermal expansion coefficient in a specified temp. range of an alloy member, the average roughness and the average spacing between ruggedness in a specified range. SOLUTION: As to this alloy member, in the case the thermal expansion coefficient in an optional temp. range from 30 to >400 deg.C of glass to be sealed is defined as 60×10-7/ deg.C to 75×10-7/ deg.C, the thermal expansion coefficient in an optional temp. range from 30 to 200-400 deg.C of the alloy member is controlled to ±5% of the thermal expansion coefficient of glass. Also, the arithmetic average roughness Ra (JIS B 0601) of the alloy member is controlled to >0 to 0.20 μm, and the average spacing Sm between ruggedness is controlled to 5 to 100 μm. Moreover, Sm/Ra is controlled to >=100. As the alloy member, an iron-nickel alloy of 43 to 48 Ni-Fe is suitable. In the case a part of iron in the alloy is substituted with one or >= two kinds selected from Ti, Zr, Hr, V, Nb, Ta, Cr, Mo and W by 0 to 5% in total, its thermal expansion coefficient can be controlled in details.
申请公布号 JP2000239801(A) 申请公布日期 2000.09.05
申请号 JP19990042771 申请日期 1999.02.22
申请人 TOSHIBA CORP 发明人 NAKAJIMA HITOSHI
分类号 C22C38/00;C22C38/08;H01L23/02;H01L31/02;H01L33/22;H01L33/48 主分类号 C22C38/00
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