LIFTING HOLDER OF UPSTREAM DRYING ETCHING APPARATUS

摘要

PURPOSE: A lifting holder of an upstream drying etching apparatus is to easily load/unload a substrate. CONSTITUTION: A lifting holder comprises a substrate holding section(200) for holding for holding a substrate loaded within a chamber(100), a lifting unit for lifting the substrate holding section. The substrate holding section has a two floor structure of a lower holder(210) and an upper holder(220), and the substrate is interposed between the lower and upper holders. The lower and upper holders are superposed on each other when holding the substrate, and are spaced from each other when loading and unloading the substrate. The lifting unit includes a fixing member(310) having a lower end fixed to a bottom of the chamber and an upper end supporting a bottom of the upper holder, a lifting member(320) with the fixing member inserted thereto, and a lifting device(330) having a lower end supporting the lower holder.