| 摘要 |
PROBLEM TO BE SOLVED: To longly control the protecting film of a thin film to be continuously formed by providing guide rolls adjacent to a rotary drum on the feeding side and coiling side in a running roll system with potential detectors. SOLUTION: A long and wide substrate 1 having electrical conductivity is continuously supplied from a feed roll 2, and film formation is executed through the circumferential face of a rotary drum 3 in a cooled state. Gaseous hydrocarbon is introduced from a gas introducing port 5, carrier gas is introduced from a gas introducing port 6, and they are mixed. The rotary drum 3 is applied with self bias voltage by a high-frequency power source 11 via a blocking capacitor 12, and these gases are held to the state of plasma in a film forming chamber. In this way, a plasma CVD film is continuously formed on the substrate 1. At this time, adjacent guide rolls 9 and 10 respectively on the feeding roll side and soiling side in the rotary drum 3 are provided with potential detectors 7 and 8, respectively. The film thickness of a plasma CVD film formed by the potential difference before and after the film formation is controlled.
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