METHOD OF FORMING RESISTOR OF ELECTROSTATIC DISCHARGING PROTECTIVE CIRCUIT

摘要

PURPOSE: A method of forming a resistor of an electrostatic discharging protective(ESD) circuit is to obtain a resistor to be needed to the ESD circuit. CONSTITUTION: A method comprises steps of: forming a field insulated film(21) on a desired portion of a first conductive semiconductor substrate; forming a number of active region layer(22) electrically insulated by doping an upper surface of the substrate with a second conductive ion; forming an insulated layer(230), having a number of contact holes for exposing a desired portion of the active region layer, on the field insulated film and the active region layer; forming a number of contact plugs for burying the contact holes with a conductive material; and forming a wiring for connecting the contact holes on the insulated layer.