SLURRY SUPPLYING SYSTEM WITH WET NITROGEN GAS SUPPLYING APPARATUS

摘要

PURPOSE: A slurry supplying system is to include a humidified nitrogen supplying apparatus for preventing a slurry from being solidified. CONSTITUTION: One side of a humidify cell(110) for changing a dry nitrogen gas into a wet nitrogen gas is engaged to a deionized solution supply line(35). The deionized solution supply line has a check valve(100) for prevent a deionized solution from reflowing, and a ball valve(35) for controlling a supply pressure of the deionized solution. The other side of the humidify cell is connected to a deionized solution discharging line(11), the deionized solution discharging line having a ball valve(35). One side of the humidify cell is connected to a humidified nitrogen discharging line(21) opposite to a flowing stream of the deionized solution. The humidified nitrogen discharging line is connected to a slurry-supplying reservoir.