THIN FILM VAPOR DEVICE FOR MANUFACTURING LUMINOUS ELEMENT

摘要

PURPOSE: A thin film vapor device for manufacturing luminous element is provided to reduce lost time due to movement of the base film(20) by moving flexible base film(20) moves inside the chamber and consecutively performing vapor process, and to reduce the space the vapor device occupies in the work room. CONSTITUTION: A thin film vapor device for manufacturing luminous element includes a chamber(2) whose internal pressure is controllable. A pair of base film(20) rollers are composed of a base film(20) supply roller(12) and a base film(20) receiving roller(14). The base film(20) supply roller(12) installed with intervals inside the chamber(2) supplies rolled base film(20). The base film(20) receiving roller(14) receives the base film(20) by rolling. A pair of mask rollers are composed of a mask supply roller(16) and a mask receiving roller(18). The mask supply roller(16) installed to the lower part of the base film(20) supply roller(12) inside the chamber(2) supplies rolled mask(22). The mask receiving roller(18) installed to the lower part of the base film(20) receiving roller(14) inside the chamber(2) receives mask by rolling. A contact fixer fixes the base film(20) and rolled mask(22) which move by the rotation of the base film(20) supply roller(12) and the mask supply roller(16) to the base film(20) receiving roller(14) and the mask receiving roller(18). A heating device sublimes organism by heating. A shutter opens and closes the aperture of the heating device.