POLISHING OF INNER SURFACE OF QUARTZ GLASS CYLINDRICAL BODY

摘要

PROBLEM TO BE SOLVED: To provide a new method for polishing the inner surface of a quartz glass cylindrical body by which the inner surface of the quartz glass cylindrical body having the inner surface subjected to a grinding working with a diamond tool can be polished without leaving a grinding flaw with the diamond tool. SOLUTION: This method comprises a first step of carrying out a polishing working with a polishing cloth deformable in shape while making a first polishing slurry flow in order to remove a grinding flaw caused by a diamond tool at the time of a grinding working and a second step of performing the polishing working for mirror finish with a brush while making a second polishing slurry flow when polishing the inner surface of the quartz glass cylindrical body having the inner surface subjected to the grinding working with the diamond tool.