| 摘要 |
PURPOSE: A radial multi-wavelength 3-D microresonator is provided to oscillate in a whispering gallery mode from a direction vertical to the semiconductor surface to a parallel direction and has a multi-wavelength output characteristic of 30-50nm depending on the angle. CONSTITUTION: A radial multi-wavelength 3-D microresonator includes a buffer layer(12) of the first conductive type, the first DBR layer(14) of the first conductive type, the first spacer layer(16), an active layer(18), the second spacer layer(20), the second DBR layer(22) of the conductive type and an ohmic layer(24) of the second conductive type for ohmic contact, which are sequentially on a semiconductor substrate(10) of the first conductive type. A trench(30) is formed in order to form an output window. The trench(30) is filled with polyimide to form an upper electrode(28) and to form a lower electrode at the other side of the semiconductor substrate(10).
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